Influence of kinetic roughening on the epitaxial growth of silicon

نویسندگان

  • Joël Chevrier
  • A. Cruz
  • N. Pinto
  • I. Berbezier
  • J. Derrien
چکیده

-The low temperature homoepitaxial growth of silicon has been probed iii situ by Reflection High Energy Electron Diffraction jRHEED) in a Molecular Beam Epitaxy jMBE)

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تاریخ انتشار 2017